Air Liquide has a complete and wide range of Bulk Chemical Distribution Systems, FabChemTM BCDS that allow the large and automatic distribution of pure chemical fluids such as acids, bases and solvents, from drums or lorries to the Points-of-Use (POUs) using pumping or pressure technologies. The Fabchem design philosophy aims to achieve high uptime and reliability through the use of multiple back-up modes.
Types of chemicals dispensed:
These types of chemicals are mainly used in photolithographic, cleaning and etching processes.
The chemical fluids can come from different sizes of incoming: 200-liter drums, 1,000-liters totes, up to ISO tank container.
Highly reliable continuous supply chemical distribution equipment for all process chemical applications. Depending on the expected flow rate, purity grade, availability and reliability, Air Liquide offers a range of systems from compact and cost-efficient to very reliable bulk chemical distribution systems suitable for high purity grade and high flow applications.
We provide chemical distribution solutions to research centers, laboratories and universities, semiconductor industries, and/or photovoltaic industries.