Generates and continuously analyzes high-accuracy forming gas mixtures: hydrogen (H2), nitrogen (N2), oxygen (O2), helium (He), argon (Ar).
Forming gas mixer
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Generates and continuously analyzes doping gas mixtures from pure or diluted doping gases: diborane (B2H6), germane (GeH4), phosphine (Ph3), etc.
Doping gas mixer
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