Air Liquide offers a configurable range of chemical blenders. Highly reliable and accurate chemical blending equipment with a continuous supply for all semiconductor blending applications (base-line). Types of chemicals blended : TMAH, HF, NH4OH, ...There are two system configurations :
Both FabChem™ DIL technologies are designed and patented to offer the reliability, capacity and accuracy required for semiconductor chemical blending applications. Several tests have been made to insure you the best reliability of our blending systems and the best accuracy of our mixtures.
We propose our chemical blending solutions for semiconductor industries.
Air Liquide’s FabChem™ On-line blender dilution is a flexible chemical blending system allowing a large panel of precise chemical mixtures with dynamic recipe changes possibilities. This equipment is a high-volume chemical blending system suitable for standard applications such as TMAH (Tetramethylammonium hydroxide) dilution. A patented flow control blend technology and real-time control are used to blend precisely chemicals with DI-water (deionized water), at high production rates and user-specified ratio. Concentrated chemicals, coming from drums, are injected into DI-water stream. Static mixers and inline metrology ensure a perfect homogenized blend of the chemical with DI-water.
Air Liquide’s FabChem™ Batch blender dilution is a medium-volume chemical blending system suitable for standard applications such as HF (hydrogen fluoride) or NH4OH (ammonia solution) dilution. The system uses a patented weight-based blending to create the target recipe. The mix tank is mounted on a scale and the constituents are added sequentially. A pump is used to homogenize as well as to validate the batch with metrology. The batch is transferred to a daytank managed by a stand-alone chemical dispenser system.