The equipment is a solution applicable to the fields of atomic layer deposition, chemical vapor deposition, plasma-enhanced chemical vapor deposition.
The Candi™ range allows liquid precursors distribution for:
To fit your needs, multiple examples of precursors can be used with the Candi™ range:
Other highly viscous precursors are also taken care of with the “Candi™ Solvent”.
Candi™ Phase 2 is fitted with an internal day tank that allows the continuous distribution of the liquid precursors at a steady pressure, including during shuttle canister change-out. There are several Candi™ Phase 2 solutions: from the Candi™ Lite for research & R&D to the Candi™ Phase 2 pyrophoric with increased safety features.
Dedicated design for pyrophoric precursors:
Candi™ Bulk is compatible with large shuttle containers (up to 200 L) and includes a bigger day tank suited for bulk use.
A pyrophoric version is also available.
Air Liquide’s Candi™ Solvent is designed to provide you with a continuous supply of viscous and highly reactive very-low vapor pressure liquid precursors at consistent pressure. Candi™ Solvent performs patented solvent cleaning for contamination-free distribution and increased safety. Solvent cleaning eliminates any risk of clogging, ensures safe shuttle drum change-out, and prevents the contamination of precursors that are sensitive to air and moisture.
Our solution works with a wide range of precursors:
The Candi bubbler closely controls the temperature and pressure while bubbling a carrier gas through a liquid precursor. This allows Candi to ensure consistent gas flow and precursor concentration to the downstream reactor process.
The Candi™ Bubbler is used to saturate by bubbling a carrier gas such as Helium or Nitrogen with liquid precursor and distribute it at a steady concentration and pressure to a Point-of-Use (POU).
Efficient & easy-to-use: you just need to enter on the touch screen the precursor concentration and the total flow rate requested at the POU.
Equipment designed for the semiconductor, fiber optic, coating, solar and compound semiconductor industries, where safety, purity, accuracy and consistency are critical to your process.