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The equipment is a solution applicable to the fields of atomic layer deposition, chemical vapor deposition, plasma-enhanced chemical vapor deposition.
The Candi™ range allows liquid precursors distribution for:
To fit your needs, multiple examples of precursors can be used with the Candi™ range:
Other highly viscous precursors are also taken care of with the “Candi™ Solvent”.
Candi™ Phase 2 is fitted with an internal day tank that allows the continuous distribution of the liquid precursors at a steady pressure, including during shuttle canister change-out. There are several Candi™ Phase 2 solutions: from the Candi™ Lite for research & R&D to the Candi™ Phase 2 pyrophoric with increased safety features.
Dedicated design for pyrophoric precursors:
Candi™ Bulk is compatible with large shuttle containers (up to 200 L) and includes a bigger day tank suited for bulk use.
A pyrophoric version is also available.
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Air Liquide’s Candi™ Solvent is designed to provide you with a continuous supply of viscous and highly reactive very-low vapor pressure liquid precursors at consistent pressure. Candi™ Solvent performs patented solvent cleaning for contamination-free distribution and increased safety. Solvent cleaning eliminates any risk of clogging, ensures safe shuttle drum change-out, and prevents the contamination of precursors that are sensitive to air and moisture.
Our solution works with a wide range of precursors:
The Candi bubbler closely controls the temperature and pressure while bubbling a carrier gas through a liquid precursor. This allows Candi to ensure consistent gas flow and precursor concentration to the downstream reactor process.
The Candi™ Bubbler is used to saturate by bubbling a carrier gas such as Helium or Nitrogen with liquid precursor and distribute it at a steady concentration and pressure to a Point-of-Use (POU).
Efficient & easy-to-use: you just need to enter on the touch screen the precursor concentration and the total flow rate requested at the POU.
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Equipment designed for the semiconductor, fiber optic, coating, solar and compound semiconductor industries, where safety, purity, accuracy and consistency are critical to your process.