Air Liquide proposes a modular and highly sophisticated slurry dispense platform. For semiconductors, these dispensers will help you to obtain an abrasive liquid allowing to polishing or iron out silicon waters. This equipment offers high performance and reliability for continuous operation in a CMP manufacturing environment.
There are two different products on the slurry dispense platform:
Both systems feature the same look and feel in terms of cabinet design, component layout and software, and both can be configured to include blending and metrology.
The Air Liquide slurry dispense platform can be used for any CMP application, and is designed to maintain the health of the slurry.
Slurry applications: Oxide, Tungsten, Copper, STI, Polysilicon...
Air Liquide’s FabChem™ CMP is a highly reliable, high-volume slurry blending and distribution system that is suitable for all types of slurries. The system works with the following technologies for blending and distribution:
The system is configured with dual mixing/day tanks. One is filled while the other dispenses slurry to the fab. When the online tank is empty, the tanks switch functions.